ITC Issues Exclusion Order on Semiconductor Planarization Slurries, With 1-Year Exemption
The International Trade Commission is issuing a limited exclusion order banning imports of chemical mechanical planarization slurries (ITC Inv. No. 337-TA-1204) from DuPont and Rohm and Haas Electronic Materials that it has determined infringe patents held by Cabot Microelectronics Corp.…
Sign up for a free preview to unlock the rest of this article
Communications Daily is required reading for senior executives at top telecom corporations, law firms, lobbying organizations, associations and government agencies (including the FCC). Join them today!
(CMC), though it will allow for a one-year exemption in some cases, it said in a notice released Dec. 21. The order concludes a Section 337 investigation that began in June 2020 (see 2007010032), based on allegations that the Optiplane family of slurry products from DuPont and Rohm and Haas infringe patents related to CMC's iDIEL line of slurries, which are used by semiconductor device manufacturers to level, smooth and remove excess material from the surfaces of various semiconductor device layers. The ITC is also issuing cease and desist orders banning importation and sale of infringing products from DuPont and Rohm and Haas. But it will allow an exemption from the limited exclusion and cease and desist orders for up to one year for imports used in an ongoing semiconductor chip fabrication development project under some conditions. The ITC set bond at 100% of entered value for entries of covered products imported during the 60-day period the administration has to review the exclusion order.